Oxide removal from copper by using argon and fluorocarbon plasma treatment Academic Article

authors

• Nastasi, Michael

published proceedings

• Thin Solid Films

author list (cited authors)

• Falkenstein, Z., Hakovirta, M., & Nastasi, M.

citation count

• 6

complete list of authors

• Falkenstein, Z||Hakovirta, M||Nastasi, M

publication date

• January 2001

publisher

• Elsevier  Publisher

published in

• THIN SOLID FILMS  Journal

Digital Object Identifier (DOI)

• 10.1016/s0040-6090(00)01537-6

start page

• 84

end page

• 87

volume

• 381

issue

• 1

URL

• http://dx.doi.org/10.1016/s0040-6090(00)01537-6