Increasing the fracture toughness of silicon by ion implantation Academic Article

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authors

Nastasi, Michael

published proceedings

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

Swadener, J. G., & Nastasi, M.

citation count

19

complete list of authors

Swadener, JG||Nastasi, M

publication date

May 2003

publisher

Elsevier Publisher

published in

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms Journal