Bonding structure and properties of ion enhanced reactive magnetron sputtered silicon carbonitride films

authors

• Nastasi, Michael

published proceedings

• Journal of Physics Condensed Matter

author list (cited authors)

• He, X., Taylor, T. N., Lillard, R. S., Walter, K. C., & Nastasi, M.

citation count

• 24

complete list of authors

• He, Xiao-Ming||Taylor, TN||Lillard, RS||Walter, KC||Nastasi, M

publication date

• September 2000

publisher

• IOP Publishing  Publisher

published in

• Journal of Physics Condensed Matter  Journal

keywords

• 40 Engineering
• 4016 Materials Engineering

Digital Object Identifier (DOI)

• 10.1088/0953-8984/12/37/101

start page

• l591

end page

• L597

volume

• 12

issue

• 37

URL

• http://dx.doi.org/10.1088/0953-8984/12/37/101