Bonding structure and properties of ion enhanced reactive magnetron sputtered silicon carbonitride films Academic Article

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authors

Nastasi, Michael

published proceedings

Journal of Physics Condensed Matter

author list (cited authors)

He, X., Taylor, T. N., Lillard, R. S., Walter, K. C., & Nastasi, M.

citation count

24

complete list of authors

He, Xiao-Ming||Taylor, TN||Lillard, RS||Walter, KC||Nastasi, M

publication date

September 2000

publisher

IOP Publishing Publisher

published in

Journal of Physics Condensed Matter Journal