Surface modification by plasma immersion ion processing
Conference Paper
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- Overview
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Overview
name of conference
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Materials Modification by Ion Irradiation
published proceedings
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Proceedings of SPIE--the International Society for Optical Engineering
author list (cited authors)
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Walter, K. C., Lee, D. H., He, X. M., Baker, N. P., Nastasi, M., Munson, C. P., ... Wood, B. P.
citation count
complete list of authors
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Walter, Kevin C||Lee, Deok H||He, XM||Baker, NP||Nastasi, Michael||Munson, CP||Scarborough, WK||Tuszewski, M||Wood, BP
editor list (cited editors)
publication date
publisher
published in
Research
keywords
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40 Engineering
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4006 Communications Engineering
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4009 Electronics, Sensors And Digital Hardware
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51 Physical Sciences
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5102 Atomic, Molecular And Optical Physics
Identity
Digital Object Identifier (DOI)
Additional Document Info
start page
end page
volume
Other
URL
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http://dx.doi.org/10.1117/12.321944