Mechanisms for ion-irradiation-induced relaxation of stress in mosaic structured Cu thin films Academic Article uri icon


  • Abstract In this paper, helium (He) ion irradiations with various fluences were performed on sputtered Cu thin films with a mosaic structure to evolve biaxial stress. X-ray diffraction of the 2 method was used to determine the residual strains in the thin films by measuring the spacing of the crystallographic planes. The results show the in-plane biaxial tensile stress has been reduced by ion irradiation. A new proposed model is discussed to explain the ion-irradiation-induced stress release in mosaic structured Cu thin films.

published proceedings

  • Journal of Physics D

author list (cited authors)

  • Fu, E. G., Wang, Y. Q., & Nastasi, M.

citation count

  • 11

complete list of authors

  • Fu, EG||Wang, YQ||Nastasi, M

publication date

  • December 2012