Cold ion-cutting of hydrogen implanted Si Academic Article

authors

• Nastasi, Michael

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

altmetric score

• 3

author list (cited authors)

• Henttinen, K., Suni, T., Nurmela, A., Suni, I., Lau, S. S., Hchbauer, T., Nastasi, M., & Airaksinen, V.

citation count

• 15

complete list of authors

• Henttinen, K||Suni, T||Nurmela, A||Suni, I||Lau, SS||Höchbauer, T||Nastasi, M||Airaksinen, V-M

publication date

• May 2002

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

Digital Object Identifier (DOI)

• 10.1016/s0168-583x(01)01209-5

start page

• 761

end page

• 766

volume

• 190

issue

• 1-4

URL

• http://dx.doi.org/10.1016/s0168-583x(01)01209-5