Ion Implantation Chapter uri icon


  • Abstract Modern technology depends on materials with precisely controlled properties. Ion beams are a favored method (and in integrated circuit technology, the prime method) to achieve controlled modification of surfaces and near-surface regions. In every integrated circuit production line there are ion implantation systems. In addition to integrated circuit technology, ion beams are used to modify the mechanical, tribological, and chemical properties of metals, intermetallics, and ceramics without altering their bulk properties. This article reviews the fundamental of ion?solid interactions so that the reader will be able to understand the basic phenomena that occur when an energetic ion is implanted into a solid. The role of ion implantation in today?s modern technology is explored.

author list (cited authors)

  • Nastasi, M., Mayer, J. W., & Walter, K. C.

citation count

  • 0

Book Title

  • Kirk-Othmer Encyclopedia of Chemical Technology

publication date

  • March 2005