The influence of ion-implantation damage on hydrogen-induced ion-cut Academic Article

authors

• Nastasi, Michael

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

• Hchbauer, T., Misra, A., Verda, R., Zheng, Y., Lau, S. S., Mayer, J. W., & Nastasi, M.

citation count

• 19

complete list of authors

• Höchbauer, T||Misra, A||Verda, R||Zheng, Y||Lau, SS||Mayer, JW||Nastasi, M

publication date

• April 2001

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

Digital Object Identifier (DOI)

• 10.1016/s0168-583x(00)00540-1

start page

• 169

end page

• 175

volume

• 175

URL

• http://dx.doi.org/10.1016/s0168-583x(00)00540-1