Assessment of subsurface damage in polished IIVI semiconductors by ion channeling Academic Article

authors

• Nastasi, Michael

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

• Lucca, D. A., Wetteland, C. J., Misra, A., Klopfstein, M. J., Nastasi, M., Maggiore, C. J., & Tesmer, J. R.

citation count

• 16

complete list of authors

• Lucca, DA||Wetteland, CJ||Misra, A||Klopfstein, MJ||Nastasi, M||Maggiore, CJ||Tesmer, JR

publication date

• June 2004

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

Digital Object Identifier (DOI)

• 10.1016/j.nimb.2004.01.129

start page

• 611

end page

• 617

volume

• 219

URL

• http://dx.doi.org/10.1016/j.nimb.2004.01.129