Using ion beam analysis in determining the mechanisms of cleavage in hydrogen ion implanted Si Academic Article

authors

• Nastasi, Michael

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

• Nastasi, M., Hchbauer, T., Verda, R. D., Misra, A., Lee, J., Mayer, J. W., & Lau, S. S.

citation count

• 4

complete list of authors

• Nastasi, Michael||Höchbauer, Tobias||Verda, Raymond D||Misra, Amit||Lee, Jung-Kun||Mayer, James W||Lau, SS

publication date

• June 2004

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

Digital Object Identifier (DOI)

• 10.1016/j.nimb.2004.01.128

start page

• 604

end page

• 610

volume

• 219

URL

• http://dx.doi.org/10.1016/j.nimb.2004.01.128