Internal stress reduction in diamond like carbon thin films by ion irradiation Academic Article

authors

• Nastasi, Michael

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

altmetric score

• 3

author list (cited authors)

• Lee, D. H., Fayeulle, S., Walter, K. C., & Nastasi, M.

citation count

• 29

complete list of authors

• Lee, DH||Fayeulle, S||Walter, KC||Nastasi, M

publication date

• January 1999

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

keywords

• Mental Health

Digital Object Identifier (DOI)

• 10.1016/s0168-583x(98)00739-3

start page

• 216

end page

• 220

volume

• 148

issue

• 1-4

URL

• http://dx.doi.org/10.1016/s0168-583x(98)00739-3