Internal stress reduction in diamond like carbon thin films by ion irradiation

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authors

Nastasi, Michael

published proceedings

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

altmetric score

3

author list (cited authors)

Lee, D. H., Fayeulle, S., Walter, K. C., & Nastasi, M.

citation count

31

complete list of authors

Lee, DH||Fayeulle, S||Walter, KC||Nastasi, M

publication date

January 1999

publisher

Elsevier Publisher

published in

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms Journal