Effects of ion irradiation on the mechanical properties of SiNawOxCyHz solgel derived thin films

authors

• Nastasi, Michael

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

• Lucca, D. A., Qi, Y., Harriman, T. A., Prenzel, T., Wang, Y. Q., Nastasi, M., Dong, J., & Mehner, A.

citation count

• 5

complete list of authors

• Lucca, DA||Qi, Y||Harriman, TA||Prenzel, T||Wang, YQ||Nastasi, M||Dong, J||Mehner, A

publication date

• October 2010

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

keywords

• 51 Physical Sciences
• 5104 Condensed Matter Physics
• 5106 Nuclear And Plasma Physics

Digital Object Identifier (DOI)

• 10.1016/j.nimb.2010.05.010

start page

• 2926

end page

• 2929

volume

• 268

issue

• 19

URL

• http://dx.doi.org/10.1016/j.nimb.2010.05.010