Effect of carrier gas on the deposition of titanium carbo-nitride coatings by a novel organo-metallic plasma immersion ion processing technique Academic Article uri icon

published proceedings

  • Vacuum

author list (cited authors)

  • Peters, A. M., & Nastasi, M.

citation count

  • 24

complete list of authors

  • Peters, AM||Nastasi, M

publication date

  • September 2002

published in