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Effect of carrier gas on the deposition of titanium carbo-nitride coatings by a novel organo-metallic plasma immersion ion processing technique
Academic Article
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Identity
Additional Document Info
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Overview
authors
Nastasi, Michael
published proceedings
Vacuum
author list (cited authors)
Peters, A. M., & Nastasi, M.
citation count
24
complete list of authors
Peters, AM||Nastasi, M
publication date
September 2002
publisher
Elsevier
Publisher
published in
Vacuum
Journal
Identity
Digital Object Identifier (DOI)
10.1016/s0042-207x(02)00108-2
Additional Document Info
start page
169
end page
175
volume
67
issue
2
Other
URL
http://dx.doi.org/10.1016/s0042-207x(02)00108-2