Recent advances in plasma source ion implantation at Los Alamos National Laboratory
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Surface and Coatings Technology
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Munson, C. P., Faehl, R. J., Henins, I., Nastasi, M., Reass, W. A., Rej, D. J., ... Wood, B. P.
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Munson, Carter P||Faehl, RJ||Henins, I||Nastasi, M||Reass, WA||Rej, DJ||Scheuer, JT||Walter, KC||Wood, BP
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http://dx.doi.org/10.1016/s0257-8972(95)02836-6