Recent advances in plasma source ion implantation at Los Alamos National Laboratory Academic Article uri icon

published proceedings

  • Surface and Coatings Technology

author list (cited authors)

  • Munson, C. P., Faehl, R. J., Henins, I., Nastasi, M., Reass, W. A., Rej, D. J., ... Wood, B. P.

citation count

  • 40

complete list of authors

  • Munson, Carter P||Faehl, RJ||Henins, I||Nastasi, M||Reass, WA||Rej, DJ||Scheuer, JT||Walter, KC||Wood, BP

publication date

  • October 1996