Formation of hydrogen complexes in proton implanted silicon and their influence on the crystal damage Academic Article uri icon

published proceedings

  • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

  • Hchbauer, T., Misra, A., Nastasi, M., Mayer, J. W., & Ensinger, W.

citation count

  • 3

complete list of authors

  • Höchbauer, T||Misra, A||Nastasi, M||Mayer, JW||Ensinger, W

publication date

  • January 2006