Chemical and mechanical properties of silica hybrid films from NaOH catalyzed sols for micromachining with diamond cutting tools uri icon

published proceedings

  • Thin Solid Films

author list (cited authors)

  • Prenzel, T., Mehner, A., Lucca, D. A., Qi, Y., Harriman, T. A., Mutlugnes, Y., ... Swiderek, P.

citation count

  • 2

complete list of authors

  • Prenzel, T||Mehner, A||Lucca, DA||Qi, Y||Harriman, TA||Mutlugünes, Y||Shojaee, SA||Wang, YQ||Williams, D||Nastasi, M||Zoch, H-W||Swiderek, P

publication date

  • March 2013