Relationship between damage evolution and SiH complexes formation in hydrogen implanted Si Academic Article

authors

• Nastasi, Michael

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

• Lee, J. K., Hchbauer, T., Averitt, R. D., & Nastasi, M.

citation count

• 2

complete list of authors

• Lee, JK||Höchbauer, T||Averitt, RD||Nastasi, M

publication date

• June 2004

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

Digital Object Identifier (DOI)

• 10.1016/j.nimb.2004.01.138

start page

• 662

end page

• 665

volume

• 219

URL

• http://dx.doi.org/10.1016/j.nimb.2004.01.138