Ion implantation effects in single crystal Si investigated by Raman spectroscopy

authors

• Nastasi, Michael

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

• Harriman, T. A., Lucca, D. A., Lee, J., Klopfstein, M. J., Herrmann, K., & Nastasi, M.

citation count

• 15

complete list of authors

• Harriman, TA||Lucca, DA||Lee, J-K||Klopfstein, MJ||Herrmann, K||Nastasi, M

publication date

• May 2009

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

keywords

• 51 Physical Sciences
• 5104 Condensed Matter Physics

Digital Object Identifier (DOI)

• 10.1016/j.nimb.2009.01.021

start page

• 1232

end page

• 1234

volume

• 267

issue

• 8-9

URL

• http://dx.doi.org/10.1016/j.nimb.2009.01.021