Boron-induced redistribution of hydrogen implanted at elevated temperature into crystalline silicon Academic Article

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authors

Nastasi, Michael

published proceedings

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

Verda, R. D., Nastasi, M., & Bower, R. W.

citation count

0

complete list of authors

Verda, RD||Nastasi, M||Bower, RW

publication date

May 2003

publisher

Elsevier Publisher

published in

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms Journal