Dependence of optical properties and hardness on carbon content in silicon carbonitride films deposited by plasma ion immersion processing technique Academic Article uri icon

published proceedings

  • Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

altmetric score

  • 3

author list (cited authors)

  • Afanasyev-Charkin, I. V., & Nastasi, M.

citation count

  • 9

complete list of authors

  • Afanasyev-Charkin, IV||Nastasi, M

publication date

  • May 2003