Tribological properties of carbon- and nitrogen-implanted Si(100) Academic Article uri icon

author list (cited authors)

  • Kodali, P., Hawley, M., Walter, K. C., Hubbard, K., Yu, N., Tesmer, J. R., Levine, T. E., & Nastasi, M.

citation count

  • 12

publication date

  • April 1997

published in