Tribological properties of carbon- and nitrogen-implanted Si(100)
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Kodali, P., Hawley, M., Walter, K. C., Hubbard, K., Yu, N., Tesmer, J. R., Levine, T. E., & Nastasi, M.
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Kodali, P||Hawley, M||Walter, KC||Hubbard, K||Yu, N||Tesmer, JR||Levine, TE||Nastasi, M
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http://dx.doi.org/10.1016/s0043-1648(96)07290-0