Structural and optical characterization of fluorinated hydrogenated silicon carbide films deposited by pulsed glow discharge Academic Article

authors

• Nastasi, Michael

published proceedings

• Surface and Coatings Technology

author list (cited authors)

• Jacobsohn, L. G., Franceschini, D. F., Afanasyev-Charkin, I. V., Cooke, D. W., Daemen, L. L., Averitt, R. D., & Nastasi, M.

citation count

• 2

complete list of authors

• Jacobsohn, LG||Franceschini, DF||Afanasyev-Charkin, IV||Cooke, DW||Daemen, LL||Averitt, RD||Nastasi, M

publication date

• May 2006

publisher

• Elsevier  Publisher

published in

• Surface and Coatings Technology  Journal

Digital Object Identifier (DOI)

• 10.1016/j.surfcoat.2005.09.015

start page

• 6079

end page

• 6082

volume

• 200

issue

• 20-21

URL

• http://dx.doi.org/10.1016/j.surfcoat.2005.09.015