Structural and optical characterization of fluorinated hydrogenated silicon carbide films deposited by pulsed glow discharge Academic Article uri icon

published proceedings

  • Surface and Coatings Technology

author list (cited authors)

  • Jacobsohn, L. G., Franceschini, D. F., Afanasyev-Charkin, I. V., Cooke, D. W., Daemen, L. L., Averitt, R. D., & Nastasi, M.

citation count

  • 2

complete list of authors

  • Jacobsohn, LG||Franceschini, DF||Afanasyev-Charkin, IV||Cooke, DW||Daemen, LL||Averitt, RD||Nastasi, M

publication date

  • May 2006