Heavy ion (Xe and I) irradiation effects on photoresist films Academic Article

authors

• Nastasi, Michael

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

author list (cited authors)

• Garcia, I., Zawislak, F. C., Balzaretti, N. M., & Nastasi, M.

citation count

• 4

complete list of authors

• Garcia, Irene TS||Zawislak, FC||Balzaretti, Naira M||Nastasi, M

publication date

• May 2002

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

Digital Object Identifier (DOI)

• 10.1016/s0168-583x(02)00643-2

start page

• 733

end page

• 738

volume

• 191

issue

• 1-4

URL

• http://dx.doi.org/10.1016/s0168-583x(02)00643-2