Chemical bonding investigation of amorphous hydrogenated SiN alloys deposited by plasma immersion ion processing Academic Article uri icon

published proceedings

  • Thin Solid Films

author list (cited authors)

  • Jacobsohn, L. G., Schulze, R. K., Daemen, L. L., Afanasyev-Charkin, I. V., & Nastasi, M.

citation count

  • 3

complete list of authors

  • Jacobsohn, LG||Schulze, RK||Daemen, LL||Afanasyev-Charkin, IV||Nastasi, M

publication date

  • January 2006