Chemical bonding investigation of amorphous hydrogenated SiN alloys deposited by plasma immersion ion processing Academic Article

authors

• Nastasi, Michael

published proceedings

• Thin Solid Films

author list (cited authors)

• Jacobsohn, L. G., Schulze, R. K., Daemen, L. L., Afanasyev-Charkin, I. V., & Nastasi, M.

citation count

• 3

complete list of authors

• Jacobsohn, LG||Schulze, RK||Daemen, LL||Afanasyev-Charkin, IV||Nastasi, M

publication date

• January 2006

publisher

• Elsevier  Publisher

published in

• THIN SOLID FILMS  Journal

Digital Object Identifier (DOI)

• 10.1016/j.tsf.2005.07.166

start page

• 219

end page

• 222

volume

• 494

issue

• 1-2

URL

• http://dx.doi.org/10.1016/j.tsf.2005.07.166