Comparison of thermally and mechanically induced Si layer transfer in hydrogen-implanted Si wafers Academic Article

authors

• Nastasi, Michael

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

altmetric score

• 3

author list (cited authors)

• Hchbauer, T., Misra, A., Nastasi, M., Henttinen, K., Suni, T., Suni, I., Lau, S. S., & Ensinger, W.

citation count

• 12

complete list of authors

• Höchbauer, T||Misra, A||Nastasi, M||Henttinen, K||Suni, T||Suni, I||Lau, SS||Ensinger, W

publication date

• February 2004

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

Digital Object Identifier (DOI)

• 10.1016/j.nimb.2003.11.043

start page

• 257

end page

• 263

volume

• 216

URL

• http://dx.doi.org/10.1016/j.nimb.2003.11.043