Hydrogen-implantation induced silicon surface layer exfoliation Academic Article uri icon

published proceedings

  • Philosophical Magazine B

author list (cited authors)

  • Hochbauert, T., Misra, A., Verda, R., Nastasi, M., Mayer, J. W., Zheng, Y., & Lau, S. S.

citation count

  • 20

complete list of authors

  • Hochbauert, T||Misra, A||Verda, R||Nastasi, M||Mayer, JW||Zheng, Y||Lau, SS

publication date

  • November 2000