Ion beam induced modifications in dc sputtered TiN/BCN multilayers Academic Article

authors

• Nastasi, Michael

published proceedings

• Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

altmetric score

• 3

author list (cited authors)

• Fayeulle, S., Torri, P., Nastasi, M., Lu, Y., Kung, H., & Tesmer, J. R.

citation count

• 3

complete list of authors

• Fayeulle, S||Torri, P||Nastasi, M||Lu, Y-C||Kung, H||Tesmer, JR

publication date

• May 1997

publisher

• Elsevier  Publisher

published in

• Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms  Journal

Digital Object Identifier (DOI)

• 10.1016/s0168-583x(96)00885-3

start page

• 198

end page

• 202

volume

• 127

URL

• http://dx.doi.org/10.1016/s0168-583x(96)00885-3