Thermal and ion irradiation stability of direct current sputtered TiN/B–C–N multilayers Academic Article uri icon

altmetric score

  • 3

author list (cited authors)

  • Fayeulle, S., Nastasi, M., Lu, Y. C., Kung, H., & Tesmer, J. R.

citation count

  • 5

publication date

  • March 1997