Thermal and ion irradiation stability of direct current sputtered TiN/BCN multilayers Academic Article uri icon

abstract

  • The response of TiN/BCN multilayers to vacuum annealing at 900C and to 300 keV argon irradiation is studied. Changes in composition, stress field, bilayer repeat length, and layered structure are reported. The modifications observed during thermal annealing are mainly related to the departure of nitrogen because of the initial high state of compressive stress. During irradiation, the viscous flow of atoms perpendicular to the stress field causes an increase of the bilayer repeat length and interdiffusion between each layer. This mechanism leads to relaxation of stress and to the disappearance of the layered structure for higher dose.

published proceedings

  • Applied Physics Letters

altmetric score

  • 3

author list (cited authors)

  • Fayeulle, S., Nastasi, M., Lu, Y. C., Kung, H., & Tesmer, J. R.

citation count

  • 4

publication date

  • March 1997