Stress-related interdiffusion in dc sputtered TiN/BCN multilayers Academic Article uri icon

abstract

  • The diffusion in TiN/BCN multilayers during vacuum annealing at temperatures up to 1000C and/or 300 keV argon irradiation is studied. Changes in composition, stress field, bilayer repeat length, and interface quality are reported. The effect of stress on diffusion is proved by performing the same annealing or the same irradiation on a multilayer with and without compressive stress. During thermal annealing, demixing or phase separation is observed. On the contrary, during irradiation, mixing occurs. Both phenomena are enhanced in the presence of the stress field.

published proceedings

  • Applied Physics Letters

author list (cited authors)

  • Fayeulle, S., & Nastasi, M.

citation count

  • 6

complete list of authors

  • Fayeulle, S||Nastasi, M

publication date

  • August 1998