Diamondlike carbon deposition on silicon using radio-frequency inductive plasma of Ar and C2H2 gas mixture in plasma immersion ion deposition Academic Article uri icon

author list (cited authors)

  • Lee, D. H., He, X. M., Walter, K. C., Nastasi, M., Tesmer, J. R., Tuszewski, M., & Tallant, D. R.

citation count

  • 39

publication date

  • October 1998