Hydrogen blister depth in boron and hydrogen coimplanted n-type silicon Academic Article uri icon

published proceedings

  • Applied Physics Letters

altmetric score

  • 3

author list (cited authors)

  • Hchbauer, T., Nastasi, M., & Mayer, J. W.

citation count

  • 20

complete list of authors

  • Höchbauer, T||Nastasi, M||Mayer, JW

publication date

  • December 1999