Orientation dependence of blistering in H-implanted Si Academic Article uri icon

published proceedings

  • Journal of Applied Physics

author list (cited authors)

  • Zheng, Y., Lau, S. S., Hchbauer, T., Misra, A., Verda, R., He, X., Nastasi, M., & Mayer, J. W.

citation count

  • 58

complete list of authors

  • Zheng, Y||Lau, SS||Höchbauer, T||Misra, A||Verda, R||He, X-M||Nastasi, M||Mayer, JW

publication date

  • March 2001