Effects of hydrogen implantation temperature on ion-cut of silicon Academic Article uri icon

altmetric score

  • 3

author list (cited authors)

  • Lee, J. K., Nastasi, M., Theodore, N. D., Smalley, A., Alford, T. L., Mayer, J. W., Cai, M., & Lau, S. S.

citation count

  • 29

publication date

  • July 2004