Plasma hydrogenation of strain-relaxed SiGe∕Si heterostructure for layer transfer Academic Article uri icon

author list (cited authors)

  • Chen, P., Chu, P. K., Höchbauer, T., Nastasi, M., Buca, D., Mantl, S., ... Lau, S. S.

citation count

  • 6

publication date

  • November 2004