Investigation of plasma hydrogenation and trapping mechanism for layer transfer
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Chen, P., Chu, P. K., Hchbauer, T., Lee, J., Nastasi, M., Buca, D., ... Lau, S. S.
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Chen, Peng||Chu, Paul K||Höchbauer, T||Lee, J-K||Nastasi, M||Buca, D||Mantl, S||Loo, R||Caymax, M||Alford, T||Mayer, JW||Theodore, N David||Cai, M||Schmidt, B||Lau, SS
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http://dx.doi.org/10.1063/1.1852087