Investigation of plasma hydrogenation and trapping mechanism for layer transfer Academic Article uri icon

published proceedings

  • Applied Physics Letters

author list (cited authors)

  • Chen, P., Chu, P. K., Hchbauer, T., Lee, J., Nastasi, M., Buca, D., ... Lau, S. S.

citation count

  • 27

complete list of authors

  • Chen, Peng||Chu, Paul K||Höchbauer, T||Lee, J-K||Nastasi, M||Buca, D||Mantl, S||Loo, R||Caymax, M||Alford, T||Mayer, JW||Theodore, N David||Cai, M||Schmidt, B||Lau, SS

publication date

  • January 2005