Controlled drive-in and precipitation of hydrogen during plasma hydrogenation of silicon using a thin compressively strained SiGe layer Academic Article uri icon

altmetric score

  • 7

author list (cited authors)

  • Okba, F., Cherkashin, N., Di, Z., Nastasi, M., Rossi, F., Merabet, A., & Claverie, A.

citation count

  • 10

publication date

  • July 2010