Sharp crack formation in low fluence hydrogen implanted Si0.75Ge0.25/B doped Si0.70Ge0.30/Si heterostructure Academic Article uri icon

author list (cited authors)

  • Chen, D. a., Zhang, M., Liu, S. u., Wang, Y., Nastasi, M., Xue, Z., Wang, X. i., & Di, Z.

publication date

  • January 1, 2013 11:11 AM