Inductive plasma sources for plasma implantation and deposition Academic Article

authors

• Nastasi, Michael

published proceedings

• IEEE Transactions on Plasma Science

author list (cited authors)

• Tuszewski, M., Henins, I., Nastasi, M., Scarborough, W. K., Walter, K. C., & Lee, D. H.

citation count

• 22

complete list of authors

• Tuszewski, M||Henins, I||Nastasi, M||Scarborough, WK||Walter, KC||Lee, DH

publication date

• January 1998

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE Transactions on Plasma Science  Journal

Digital Object Identifier (DOI)

• 10.1109/27.747883

start page

• 1653

end page

• 1660

volume

• 26

issue

• 6

URL

• http://dx.doi.org/10.1109/27.747883