Investigation of Ion Beam Mixing of Iron Marker Layers in Aluminum Oxide by RBS Academic Article

abstract

• ABSTRACTThin films made with a thin embedded marker layer of iron or iron oxide in amorphous alumina were ion mixed with 210 keV Ar over a temperature range of RT to 750C in vacuum. The dose range was 5l015-7l016ions/cm2with an average dose rate of 4.51012ions/cm2-sec. The resulting marker distributions were analyzed using RBS. Spreading of the iron RBS peak due to mixing into the alumina matrix was observed in the Fe2O3marker samples and was clearly seen to be a function of temperature (>400C) and dose, whereas for the Fe marker sample, no such temperature dependence was observed. An activation energy for the thermally assisted ion mixing in the Fe2O3marker sample was determined to be 0.69 eV in comparison to an activation energy of 1.77 eV for samples that underwent only a thermal treatment.

authors

• Nastasi, Michael

published proceedings

• MRS Advances

author list (cited authors)

• Cooper, E. A., Nastasi, M., & Sickafus, K. E.

citation count

• 2

publication date

• 1992

publisher

• Springer Nature  Publisher

published in

• MRS Advances  Journal

keywords

• 34 Chemical Sciences
• 3406 Physical Chemistry

Digital Object Identifier (DOI)

• 10.1557/proc-279-457

start page

• 457

volume

• 279

URL

• http://dx.doi.org/10.1557/proc-279-457