First Results from the Los Alamos Plasma Source Ion Implantation Experiment Academic Article

abstract

• ABSTRACTA new facility is operational at Los Alamos to examine plasma source ion implantation on a large scale. Large workpieces can be treated in a 1.5-m-diameter, 4.6-m-Jong plasma vacuum chamber. Primary emphasis is directed towards improving tribological properties of metal surfaces. First experiments have been performed at 40 kV with nitrogen plasmas. Both coupons and manufactured components, with surface areas up to 4 m2, have been processed. Composition and surface hardness of implanted materials are evaluated. Implant conformality and dose uniformity into practical geometries are estimated with multidimensional particle-in-cell computations of plasma electron and ion dynamics, and Monte Carlo simulations of ion transport in solids.

authors

• Nastasi, Michael

published proceedings

• MRS Advances

author list (cited authors)

• Rej, D. J., Conrad, J. R., Faehl, R. J., Gribble, R. J., Henins, I., Horswill, N., ... Wood, B. P.

citation count

• 0

publication date

• January 1993

publisher

• Springer Nature  Publisher

published in

• MRS Advances  Journal

keywords

• 34 Chemical Sciences
• 3403 Macromolecular And Materials Chemistry
• 40 Engineering
• 4016 Materials Engineering
• 4018 Nanotechnology

Digital Object Identifier (DOI)

• 10.1557/proc-316-593

start page

• 593

volume

• 316

URL

• http://dx.doi.org/10.1557/proc-316-593