Film Softening Effects of ZrO2 oN MOS12 Academic Article

abstract

• AbstractWe have investigated the effect of thin films of ZrO2 on the mechanical behavior of [001] single-crystalline MoSi2. Previous work in our laboratories has shown there to be a 20-40% reduction in hardness in coated samples relative to the corresponding uncoated samples. We now compare fracture around the indentations as a function of thickness. Thicker ZrO2 coatings reduce radial crack length around the indentation through the intrinsic compressive stress at the film/substrate interface. In addition, ZrO2-coated materials tested in compression at 1250C exhibit approximately twice the plastic strain of uncoated materials, indicating that reduction in hardness is associated with enhanced plasticity from dislocation activity associated with the film/substrate interface.

authors

• Nastasi, Michael

published proceedings

• MRS Advances

author list (cited authors)

• Czarnik, C. M., Gibala, R., Nastasi, M., & Garrett, J. D.

citation count

• 2

complete list of authors

• Czarnik, CM||Gibala, R||Nastasi, M||Garrett, JD

publication date

• January 1993

publisher

• Springer Nature  Publisher

published in

• MRS Advances  Journal

Digital Object Identifier (DOI)

• 10.1557/proc-322-185

start page

• 185

end page

• 190

volume

• 322

issue

• 1

URL

• http://dx.doi.org/10.1557/proc-322-185