Carbon, Nitrogen, and Oxygen Ion Implantation of Stainless Steel Academic Article uri icon

abstract

  • AbstractIon implantation experiments of C, N and O into stainless steel have been performed with beam-line and plasma source ion implantation methods. Acceleration voltages are varied between 27 and 50 kV, with pulsed ion current densities between 1 and 10 mA/cm2. Implanted doses range from 0.5 to 31018cm-2, while workpiece temperatures are maintained between 25 and 800C. The implant concentration profiles, microstructure and surface mechanical properties of the implanted materials are reported.

published proceedings

  • MRS Advances

author list (cited authors)

  • Rej, D. J., Gavrilov, N. V., Emlin, D., Henins, I., Kern, K., Kurennykh, T., ... Walter, K. C.

citation count

  • 2

complete list of authors

  • Rej, DJ||Gavrilov, NV||Emlin, D||Henins, I||Kern, K||Kurennykh, T||Mizgulin, VN||Munson, CP||Nastasi, M||Scheuer, JT||Vykhodets, V||Walter, KC

publication date

  • January 1995