Fluorinated Diamond-Like Carbon Films Produced by Plasma Immersion Ion Processing Technique Academic Article

abstract

• ABSTRACTFluorinated diamond-like carbon (F-DLC) coatings were deposited on polished silicon substrates with plasma immersion ion processing (PIIP) technique. In the PIIP technique, pulsed glow discharge plasma from a mixture of acetylane and hexafluoroethane gases was used. Contact angle measurements were performed in order to see the un-wetting properties of the coatings. The film composition was measured with Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) and the hardness was measured with a Nanoindenter II. The results clearly show that the un-wetting properties and hardness are strongly dependent on the fluorine incorporation in the F-DLC coatings. With optimized gas ratio of acetylane and hexafluoroethane gases, a combination of extremely good un-wetting properties and high hardness was achieved.

authors

• Nastasi, Michael

published proceedings

• MRS Advances

author list (cited authors)

• Hakovirta, M., Lee, D. H., He, X. M., & Nastasi, M.

citation count

• 0

publication date

• January 1999

publisher

• Springer Nature  Publisher

published in

• MRS Advances  Journal

keywords

• 34 Chemical Sciences
• 3403 Macromolecular And Materials Chemistry
• 40 Engineering
• 4016 Materials Engineering
• 4018 Nanotechnology

Digital Object Identifier (DOI)

• 10.1557/proc-593-285

start page

• 285

volume

• 593

URL

• http://dx.doi.org/10.1557/proc-593-285