Design of a large-scale plasma source ion implantation experiment Conference Paper

name of conference

• International Conference on Plasma Sciences (ICOPS)

authors

• Nastasi, Michael

published proceedings

• 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS)

author list (cited authors)

• Wood, B. P., Rej, D. J., Henins, I., Scheuer, J. T., Reass, W. A., Faehl, R. J., Nastasi, M. A., & Olsher, R. H.

citation count

• 1

complete list of authors

• Wood, BP||Rej, DJ||Henins, I||Scheuer, JT||Reass, WA||Faehl, RJ||Nastasi, MA||Olsher, RH

publication date

• January 1993

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE International Conference on Plasma Science  Journal

Digital Object Identifier (DOI)

• 10.1109/plasma.1993.593096

start page

• 100

URL

• http://dx.doi.org/10.1109/plasma.1993.593096