Recent Results From A Large-scale Plasma Source Ion Implantation Experiment Conference Paper

name of conference

• Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)

authors

• Nastasi, Michael

published proceedings

• 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS)

author list (cited authors)

• Wood, B. P., Henins, I., Reass, W. A., Faehl, R. J., Rej, D. J., Nastasi, M. A., & Walter, K. C.

citation count

• 0

complete list of authors

• Wood, BP||Henins, I||Reass, WA||Faehl, RJ||Rej, DJ||Nastasi, MA||Walter, KC

publication date

• January 1994

publisher

• Institute of Electrical and Electronics Engineers (IEEE)  Publisher

published in

• IEEE International Conference on Plasma Science  Journal

Digital Object Identifier (DOI)

• 10.1109/plasma.1994.588984

start page

• 165

end page

• 166

URL

• http://dx.doi.org/10.1109/plasma.1994.588984