Plasma Source Ion Implantation research and applications at Los Alamos National Laboratory Conference Paper

name of conference

• The fourteenth international conference on the application of accelerators in research and industry

authors

• Nastasi, Michael

published proceedings

• AIP Conference Proceedings

author list (cited authors)

• Munson, C. P., Faehl, R. J., Henins, I., Nastasi, M., Reass, W., Rej, D. J., ... Wood, B. P.

citation count

• 0

complete list of authors

• Munson, CP||Faehl, RJ||Henins, I||Nastasi, M||Reass, W||Rej, DJ||Scheuer, JT||Tuszewski, M||Walter, KC||Wood, BP

publication date

• January 1997

publisher

• AIP Publishing  Publisher

published in

• AIP Conference Proceedings  Journal

Digital Object Identifier (DOI)

• 10.1063/1.52620

start page

• 973

end page

• 976

URL

• http://dx.doi.org/10.1063/1.52620