Chapter 8 Beyond the Rayleigh Limit in Optical Lithography Chapter

authors

• Zubairy, Muhammad

author list (cited authors)

• Al-Amri, M., Liao, Z., & Zubairy, M. S.

citation count

• 12

complete list of authors

• Al-Amri, Mohammad||Liao, Zeyang||Zubairy, M Suhail

Book Title

• Advances in Atomic, Molecular, and Optical Physics

publication date

• January 2012

publisher

• Elsevier  Publisher

published in

• Advances in Atomic and Molecular Physics  Journal

Digital Object Identifier (DOI)

• 10.1016/b978-0-12-396482-3.00008-9

start page

• 409

end page

• 466

volume

• 61