Surface micromachined viscous spiral pump
Conference Paper
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- Overview
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- Research
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- Identity
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Overview
published proceedings
author list (cited authors)
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Kilani, M. I., Galambos, P. C., Haik, Y., & Chen, C. J.
complete list of authors
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Kilani, MI||Galambos, PC||Haik, Y||Chen, CJ
publication date
Research
keywords
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Micropump
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Spiral
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Surface Micromachining
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Viscous
Identity
International Standard Book Number (ISBN) 10
Additional Document Info