Surface micromachined viscous spiral pump Conference Paper uri icon

published proceedings

  • NANOTECH 2003, VOL 1

author list (cited authors)

  • Kilani, M. I., Galambos, P. C., Haik, Y., & Chen, C. J.

complete list of authors

  • Kilani, MI||Galambos, PC||Haik, Y||Chen, CJ

publication date

  • January 2003