Fabrication of NdFeB Thin Film and Its Application in MEMS Conference Paper uri icon


  • The paper measures the magnetic properties of NdFeB thin films developed under the effects of magnetic field. The samples exhibited a larger residual inductance, saturation magnetization and energy product than those treated without field or with weaker field. Magnetic MEMS was introduced with application of the NdFeB film to micro device such as pumps and gear transmission system.

name of conference

  • ASME 2002 International Mechanical Engineering Congress and Exposition

published proceedings

  • Microelectromechanical Systems

author list (cited authors)

  • Zheng, P., Kilani, M., Haik, Y. S., & Chen, C.

citation count

  • 0

complete list of authors

  • Zheng, Pan||Kilani, Mohammad||Haik, Yousef S||Chen, Ching-Jen

publication date

  • January 2002