Nanoscale optical assessment of photochemical changes of SU-8 photoresist induced by ultrashort near-IR optical excitation Academic Article

Overview
Research
Identity
Additional Document Info
Other
View All

authors

Yakovlev, Vladislav

published proceedings

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

author list (cited authors)

Marble, C. B., Marble, K. S., & Yakovlev, V. V.

citation count

0

complete list of authors

Marble, Christopher B||Marble, Kassie S||Yakovlev, Vladislav V

publication date

September 2020

publisher

Springer Nature Publisher

published in

Applied Physics A: Materials Science and Processing Journal